Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173427 | Method of growing single crystal diamond assisted by polycrystalline diamond growth | Robert J. Basnett, Andrew Francis Basnett, Amanda Charris-Hernandez, Travis Charles Wade, Adam James Brown | 2024-12-24 |
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2022-11-08 |
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2021-06-15 |
| 10704161 | Toroidal plasma processing apparatus with a shaped workpiece holder | Robert J. Basnett | 2020-07-07 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2019-12-31 |
| 10443150 | Toroidal plasma processing apparatus with a shaped workpiece holder | Robert J. Basnett | 2019-10-15 |
| 9909215 | Method of CVD plasma processing with a toroidal plasma processing apparatus | Robert J. Basnett | 2018-03-06 |
| 8779322 | Method and apparatus for processing metal bearing gases | John A. Smith, Xing Chen, Donald K. Smith | 2014-07-15 |
| 8704171 | Chemical ionization reaction or proton transfer reaction mass spectrometry | Timothy R. Robinson, Mark Attwood, Xing Chen, Mark Philip Longson, Jonathan Henry Palk +2 more | 2014-04-22 |
| 8633782 | Radio frequency power delivery system | Siddharth P. Nagarkatti, Michael Kishinevsky, Ali Shajii, Timothy E. Kalvaitis, William McKinney +2 more | 2014-01-21 |
| 8334505 | Chemical ionization reaction or proton transfer reaction mass spectrometry | Timothy R. Robinson, Mark Attwood, Xing Chen, Mark Philip Longson, Jonathan Henry Palk +2 more | 2012-12-18 |
| 8309943 | Laser-driven light source | Donald K. Smith, Jeffrey A. Casey | 2012-11-13 |
| 8173986 | Laser-heated infrared source | Donald K. Smith, Stephen F. Horne, Matthew Besen, Paul A. Blackborow | 2012-05-08 |
| 8124906 | Method and apparatus for processing metal bearing gases | John A. Smith, Xing Chen, Donald K. Smith | 2012-02-28 |
| 8003936 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer | Timothy R. Robinson, Mark Attwood, Xing Chen, Mark Philip Longson, Jonathan Henry Palk +2 more | 2011-08-23 |
| 8003935 | Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer | Timothy R. Robinson, Mark Attwood, Xing Chen, Mark Philip Longson, Jonathan Henry Palk +2 more | 2011-08-23 |
| 7764140 | Radio frequency power delivery system | Siddharth P. Nagarkatti, Michael Kishinevsky, Ali Shajii, Timothy E. Kalvaitis, William McKinney +3 more | 2010-07-27 |
| 7659489 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2010-02-09 |
| 7569790 | Method and apparatus for processing metal bearing gases | John A. Smith, Xing Chen, Donald K. Smith | 2009-08-04 |
| 7541558 | Inductively-coupled toroidal plasma source | Donald K. Smith, Xing Chen, Eric Georgelis | 2009-06-02 |
| 7501600 | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel | Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr., Susan C. Trulli +1 more | 2009-03-10 |
| 7238266 | Method and apparatus for fluorine generation and recirculation | Donald K. Smith, Matthew Besen, Stephen F. Horne | 2007-07-03 |
| 7166816 | Inductively-coupled torodial plasma source | Xing Chen, Andrew Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz | 2007-01-23 |
| 7161112 | Toroidal low-field reactive gas source | Donald K. Smith, Xing Chen, Eric Georgelis | 2007-01-09 |
| 6924455 | Integrated plasma chamber and inductively-coupled toroidal plasma source | Xing Chen, Donald K. Smith | 2005-08-02 |