Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424460 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2019-09-24 |
| 10283325 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2019-05-07 |
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2018-05-08 |
| 9449793 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2016-09-20 |
| 9155181 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2015-10-06 |
| 8999104 | Systems, methods and apparatus for separate plasma source control | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, William Robert Entley | 2015-04-07 |
| 8710926 | Radio frequency power delivery system | Yevgeniy Barskiy, Feng Tian, Ilya Bystryak | 2014-04-29 |
| 8689822 | Pressure regulation in remote zones | Ali Shajii, Gordon Hill | 2014-04-08 |
| 8692466 | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator | Souheil Benzerrouk, Andrew Cowe, Ali Shajii, Jesse E. Ambrosina, Ken Tran +1 more | 2014-04-08 |
| 8659335 | Method and system for controlling radio frequency power | Feng Tian, David Lam, Abdul Rashid, Souheil Benzerrouk, Ilya Bystryak +3 more | 2014-02-25 |
| 8633782 | Radio frequency power delivery system | Michael Kishinevsky, Ali Shajii, Timothy E. Kalvaitis, William McKinney, Daniel Goodman +2 more | 2014-01-21 |
| 8624501 | Measuring and controlling parameters of a plasma generator | Ali Shajii, Souheil Benzerrouk | 2014-01-07 |
| 8037896 | Pressure regulation in remote zones | Ali Shajii, Gordon Hill | 2011-10-18 |
| 7829353 | Pulsed mass flow delivery system and method | Ali Shajii, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2010-11-09 |
| 7764140 | Radio frequency power delivery system | Michael Kishinevsky, Ali Shajii, Timothy E. Kalvaitis, William McKinney, Daniel Goodman +3 more | 2010-07-27 |
| 7628860 | Pulsed mass flow delivery system and method | Ali Shajii, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2009-12-08 |
| 7615120 | Pulsed mass flow delivery system and method | Ali Shajii, Matthew Besen, William R. Clark, Daniel Smith, Bora Akgerman | 2009-11-10 |
| 7477711 | Synchronous undersampling for high-frequency voltage and current measurements | Tim Kalvaitis | 2009-01-13 |
| 7120542 | Flow monitoring system | Nicholas Kottenstette, Ali Shajii, Louis R. Slamka | 2006-10-10 |
| 7072743 | Semiconductor manufacturing gas flow divider system and method | Ali Shajii | 2006-07-04 |
| 6986359 | System and method for controlling pressure in remote zones | Ali Shajii | 2006-01-17 |
| 6857323 | Two phase flow sensor using tomography techniques | Ali Shajii, John A. Smith | 2005-02-22 |