Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12207385 | Method and apparatus for plasma ignition in toroidal plasma sources | Ilya Pokidov, Chiu-Ying Tai, Joseph Desjardins, Michael Harris | 2025-01-21 |
| 12159765 | Method and apparatus for plasma generation | Ron Collins, Andrew Cowe | 2024-12-03 |
| 11854839 | Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation | Andrew Cowe | 2023-12-26 |
| 11745229 | Endpoint detection of deposition cleaning in a pumping line and a processing chamber | — | 2023-09-05 |
| 11664197 | Method and apparatus for plasma generation | Andrew Cowe, Ron Collins, Larry Bourget | 2023-05-30 |
| 11480457 | Predictive diagnostics systems and methods using vacuum pressure control valves | David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict | 2022-10-25 |
| 11367598 | Method and apparatus for deposition cleaning in a pumping line | Scott Benedict, Kevin W. Wenzel | 2022-06-21 |
| 11054058 | Actively cooled vacuum isolation valve | David F. Broyer, David Neumeister, Bradly Raymond Lefevre | 2021-07-06 |
| 11024489 | Method and apparatus for deposition cleaning in a pumping line | Scott Benedict, Kevin W. Wenzel | 2021-06-01 |
| 10649471 | Method and apparatus for pulse gas delivery with isolation valves | Junhua Ding, Michael L'Bassi | 2020-05-12 |
| 10557736 | Predictive diagnostics systems and methods using vacuum pressure control valves | David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict | 2020-02-11 |
| 10535506 | Method and apparatus for deposition cleaning in a pumping line | Scott Benedict, Kevin W. Wenzel | 2020-01-14 |
| 10337105 | Method and apparatus for valve deposition cleaning and prevention by plasma discharge | — | 2019-07-02 |
| 9945486 | Radial sealing butterfly valve | — | 2018-04-17 |
| 9133960 | Fluid control valves | Paul D. Lucas, Jaroslaw Pisera | 2015-09-15 |
| 8689822 | Pressure regulation in remote zones | Ali Shajii, Siddharth P. Nagarkatti | 2014-04-08 |
| 8037896 | Pressure regulation in remote zones | Ali Shajii, Siddharth P. Nagarkatti | 2011-10-18 |
| 7950294 | Preventive maintenance diagnostics for valve systems | Vladislav Davidkovich | 2011-05-31 |
| 7643909 | Highly responsive master-slave valve positioning | David J. Goldman, Martin Ryan, Vladislav Davidkovich | 2010-01-05 |
| 7369920 | Pressure control system with optimized performance | Vladislav Davidkovich, Dave Chamberlain, Paul D. Lucas | 2008-05-06 |
| 4799063 | Method and apparatus for isolating faults in an antenna system | — | 1989-01-17 |