Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379675 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2025-08-05 |
| 12282262 | Method for controlling extreme ultraviolet light | Shang-Chieh Chien, Li-Jui Chen | 2025-04-22 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12207381 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Shang-Chieh Chien, Li-Jui Chen | 2025-01-21 |
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Hsin-Feng Chen, Chi-Ming Yang, Li-Jui Chen | 2024-10-29 |
| 12055865 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2024-08-06 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-07-18 |
| 11650508 | Plasma position control for extreme ultraviolet lithography light sources | Hsin-Feng Chen, Chi-Ming Yang, Li-Jui Chen | 2023-05-16 |
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Che-Chang Hsu, Chieh-Jen Cheng, Li-Jui Chen, Shang-Chieh Chien, Chao-Chen Chang | 2022-06-14 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11320744 | Method and apparatus for controlling extreme ultraviolet light | Shang-Chieh Chien, Li-Jui Chen | 2022-05-03 |
| 11297710 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Shang-Chieh Chien, Li-Jui Chen | 2022-04-05 |
| 11086237 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2021-08-10 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Che-Chang Hsu, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10791616 | Radiation source apparatus | Chi-Ming Yang, Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2019-12-17 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |