Issued Patents All Time
Showing 1–25 of 264 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420313 | Onsite cleaning system and method | Yen-Hao LIU, Sung-Han Tsai, Chueh-Chi Kuo | 2025-09-23 |
| 12422755 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Heng-Hsin Liu | 2025-09-23 |
| 12405541 | Methods of servicing photolithographic apparatus | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien | 2025-09-02 |
| 12405529 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-09-02 |
| 12399438 | Method and apparatus for removing contamination | Yu-Chih Huang, Yu-Kai Chiou, Chieh-Jen Cheng | 2025-08-26 |
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Che-Chang Hsu, Chi-Ming Yang | 2025-08-05 |
| 12372878 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Sheng-Kang Yu, Heng-Hsin Liu, Shang-Chieh Chien | 2025-07-29 |
| 12372887 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2025-07-29 |
| 12372880 | System and method for detecting debris in a photolithography system | Shang-Chieh Chien, Tzu-Jung Pan, Wei-Shin Cheng, Cheng-Hung Tsai, Heng-Hsin Liu | 2025-07-29 |
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2025-07-15 |
| 12360458 | Radiation collector | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-07-15 |
| 12353142 | Semiconductor processing tool and methods of operation | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-07-08 |
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2025-07-01 |
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Yen-Shuo Su | 2025-06-17 |
| 12298672 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Heng-Hsin Liu | 2025-05-13 |
| 12302484 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Bo-Tsun Liu, Po-Chung Cheng | 2025-05-13 |
| 12292695 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Chia-Yu Lee | 2025-05-06 |
| 12287572 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-04-29 |
| 12287589 | Method and apparatus for removing contamination | Yu-Chih Huang, Yu-Kai Chiou, Chieh-Jen Cheng | 2025-04-29 |
| 12282262 | Method for controlling extreme ultraviolet light | Ssu-Yu Chen, Shang-Chieh Chien | 2025-04-22 |
| 12283512 | Semiconductor processing method and apparatus | Shuang Deng, Fan-Chi LIN, Chueh-Chi Kuo, Heng-Hsin Liu | 2025-04-22 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Yen-Shuo Su, Chun-Lin Chang, Kai-Fa Ho +1 more | 2025-04-01 |
| 12235593 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu | 2025-02-25 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2025-02-25 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2025-02-25 |