Issued Patents All Time
Showing 1–25 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-07-01 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Yen-Shuo Su, Kai-Fa Ho, Li-Jui Chen +1 more | 2025-04-01 |
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Han-Lung Chang, Heng-Hsin Liu | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-10-29 |
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Li-Jui Chen, Han-Lung Chang | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2024-10-08 |
| 12009177 | Detection using semiconductor detector | Ya-Chin King, Chrong-Jung Lin, Burn Jeng Lin, Chien-Ping Wang, Shao-Hua Wang +1 more | 2024-06-11 |
| 11979971 | EUV light source and apparatus for lithography | Yen-Shuo Su, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-07 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2024-04-30 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2023-10-24 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-08-22 |
| 11723141 | EUV radiation generation methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Han-Lung Chang, Heng-Hsin Liu | 2023-08-08 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-06-13 |
| 11608566 | High resistance virtual anode for electroplating cell | Po-Wei Wang | 2023-03-21 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-02-21 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11437161 | Lithography apparatus and method for using the same | Chieh Hsieh, Shang-Chieh Chien, Han-Lung Chang, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11419203 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Li-Jui Chen, Han-Lung Chang | 2021-12-28 |
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Feng Yuan Hsu, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu | 2021-12-14 |
| 11092555 | EUV vessel inspection method and related system | Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2021-08-17 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-13 |
| 10917959 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-09 |
| 10852191 | Light source system and polarization angle adjusting method | Jen-Hao Yeh, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-01 |