Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Chun-Lin Chang +3 more | 2024-10-08 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Chun-Lin Chang +3 more | 2023-10-24 |
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Cheng-Chieh Chen, Jeng-Yann Tsay, Li-Jui Chen, Wen-Chih Wang +1 more | 2022-01-18 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen, Li-Jui Chen +2 more | 2021-10-26 |
| 10624196 | Laser source device and extreme ultraviolet lithography device | Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen, Li-Jui Chen +2 more | 2020-04-14 |