Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2025-06-17 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Chun-Lin Chang, Kai-Fa Ho, Li-Jui Chen +1 more | 2025-04-01 |
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang, Heng-Hsin Liu | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2024-10-08 |
| 11979971 | EUV light source and apparatus for lithography | Chun-Lin Chang, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-07 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2024-01-02 |
| 11821089 | Control system for plasma chamber having controllable valve | Ying Xiao, Chin-Hsiang Lin | 2023-11-21 |
| 11800626 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2023-10-24 |
| 11720035 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang, Heng-Hsin Liu | 2023-08-08 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2023-06-13 |
| 11506986 | Thermal controlling method in lithography system | Chi-Ming Yang, Jui-Pin Wu, Li-Jui Chen | 2022-11-22 |
| 11490750 | Versatile tableware device | Chunming Cheng | 2022-11-08 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2022-05-24 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Chieh Hsieh +1 more | 2021-10-19 |
| 11133374 | Method for fabricating magnetic core | Chun-Tsung Kuo, Jiech-Fun Lu | 2021-09-28 |
| 10787742 | Control system for plasma chamber having controllable valve and method of using the same | Ying Xiao, Chin-Hsiang Lin | 2020-09-29 |
| 10461145 | Method for fabricating magnetic core | Chun-Tsung Kuo, Jiech-Fun Lu | 2019-10-29 |
| 10264861 | Wind-proof umbrella | — | 2019-04-23 |
| 10170536 | Magnetic memory with metal oxide etch stop layer and method for manufacturing the same | Hung-Wen Hsu, Jiech-Fun Lu, Kuan-Chih Huang, Tze Yun Chou, Chun-Mao Chiu +1 more | 2019-01-01 |
| 9893141 | Magnetic core, inductor, and method for fabricating the magnetic core | Chun-Tsung Kuo, Jiech-Fun Lu | 2018-02-13 |
| 9887071 | Multi-zone EPD detectors | Chien-An Chen, Ying Xiao, Chin-Hsiang Lin | 2018-02-06 |
| 9840778 | Plasma chamber having an upper electrode having controllable valves and a method of using the same | Ying Xiao, Chin-Hsiang Lin | 2017-12-12 |
| 9799721 | Integrated magnetic core inductor and methods of fabrications thereof | Chun-Tsung Kuo, Jiech-Fun Lu | 2017-10-24 |