Issued Patents All Time
Showing 1–25 of 125 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422755 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Li-Jui Chen | 2025-09-23 |
| 12405529 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-09-02 |
| 12372887 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2025-07-29 |
| 12372878 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Sheng-Kang Yu, Li-Jui Chen, Shang-Chieh Chien | 2025-07-29 |
| 12372880 | System and method for detecting debris in a photolithography system | Shang-Chieh Chien, Tzu-Jung Pan, Wei-Shin Cheng, Cheng-Hung Tsai, Li-Jui Chen | 2025-07-29 |
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2025-07-15 |
| 12360458 | Radiation collector | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-07-15 |
| 12353142 | Semiconductor processing tool and methods of operation | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-07-08 |
| 12298672 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen | 2025-05-13 |
| 12287572 | Lithography system and methods | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-04-29 |
| 12283512 | Semiconductor processing method and apparatus | Shuang Deng, Fan-Chi LIN, Chueh-Chi Kuo, Li-Jui Chen | 2025-04-22 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Yen-Shuo Su, Chun-Lin Chang, Kai-Fa Ho +1 more | 2025-04-01 |
| 12235593 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-02-25 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2025-02-25 |
| 12228863 | EUV light source contamination monitoring system | Cheng-Hung Tsai, Sheng-Kang Yu, Li-Jui Chen, Shang-Chieh Chien | 2025-02-18 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-02-04 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen | 2025-01-28 |
| 12210295 | Reticle cleaning device and method of use | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-01-28 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2025-01-07 |
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2024-12-24 |
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2024-12-10 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2024-12-03 |
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang +1 more | 2024-10-29 |