Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2025-02-25 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12085865 | System and method for detecting debris in a photolithography system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-10 |
| 11997778 | Replacement and refill method for droplet generator | Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-28 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2023-11-07 |
| 11693324 | System and method for detecting debris in a photolithography system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11599030 | Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus | Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang | 2023-03-07 |
| 11528798 | Replacement method for droplet generator | Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang | 2021-07-20 |
| 11032897 | Refill and replacement method for droplet generator | Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 10156731 | Partial random laser illumination system and device having a random phase and amplitude component | Hoang-Yan Lin | 2018-12-18 |
| 8146389 | Fiber used in wideband amplified spontaneous emission light source and the method of making the same | Sheng-Lung Huang, Chia-Yao Lo, Kwang-Yao Huang, Hsiao-Wen Lee, Sheng-Pan Huang +1 more | 2012-04-03 |
| 7519262 | Fiber used in wideband amplified spontaneous emission light source and the method of making the same | Sheng-Lung Huang, Chia-Yao Lo, Kwang-Yao Huang, Hsiao-Wen Lee, Sheng-Pan Huang +1 more | 2009-04-14 |
| 7352949 | Fiber used in wideband amplified spontaneous emission light source and the method of making the same | Sheng-Lung Huang, Chia-Yao Lo, Kwang-Yao Huang, Hsiao-Wen Lee, Sheng-Pan Huang +1 more | 2008-04-01 |
| 7298545 | High repetition rate visible optical parametric oscillator | Andrew H. Kung, Shining Zhu, Zhida Gao | 2007-11-20 |