Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405541 | Methods of servicing photolithographic apparatus | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2025-09-02 |
| 12354921 | Wafer structure including probe marked test pads | Chun-Lin Lu, Shou-Zen Chang, Ying-Tsung Chu | 2025-07-08 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2025-02-25 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-12-03 |
| 12124644 | Mouse pad device | Ho-Lung Lu, Pai-Yang Chou | 2024-10-22 |
| 12114411 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-08 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen, Chiao-Hua Cheng +6 more | 2024-08-13 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2024-08-06 |
| 11921941 | Mouse pad device | Ho-Lung Lu, Pai-Yang Chou | 2024-03-05 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2023-11-07 |
| 11653438 | Droplet collecting system and method of using the same | Yu-Fa LO, Shang-Chieh Chien | 2023-05-16 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |
| 11602037 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Heng-Hsin Liu | 2023-03-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +3 more | 2023-02-07 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Cheng-Hao LAI +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu, Cheng-Hao LAI +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Hsin-Feng Chen +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2022-09-13 |
| 11392041 | Particle removal device and method | Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2022-07-19 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2022-03-15 |
| 11153958 | Extreme ultraviolet photolithography method | Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2021-10-19 |