Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2025-02-25 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Chi-Ming Yang, Li-Jui Chen | 2024-10-29 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2024-09-17 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Chiao-Hua Cheng +6 more | 2024-08-13 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2023-11-07 |
| 11650508 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Chi-Ming Yang, Li-Jui Chen | 2023-05-16 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +3 more | 2023-02-07 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2023-01-10 |
| 11533799 | System and method for supplying target material in an EUV light source | Ming-Hsun Tsai, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu, Cheng-Hao LAI +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI +6 more | 2022-09-13 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2021-08-10 |
| 11003067 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Li-Jui Chen | 2021-05-11 |
| 10877366 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Li-Jui Chen | 2020-12-29 |
| 10795264 | Light source for lithography exposure process | Han-Lung Chang, Li-Jui Chen, Bo-Tsun Liu | 2020-10-06 |
| 10670970 | Lithography system and method thereof | Wei-Shin Cheng, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2020-06-02 |
| 10527926 | Pressurized tin collection bucket with in-line draining mechanism | Chi-Ming Yang, Li-Jui Chen | 2020-01-07 |
| 10509324 | Light source for lithography exposure process | Han-Lung Chang, Li-Jui Chen, Bo-Tsun Liu | 2019-12-17 |
| 10338475 | Light source for lithography exposure process | Han-Lung Chang, Li-Jui Chen, Bo-Tsun Liu | 2019-07-02 |
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Bo-Tsun Liu, Li-Jui Chen, Han-Lung Chang | 2018-12-25 |
| 9479253 | Optical communication device and optical communication method | Tze-An Liu, Po-Er Hsu | 2016-10-25 |