Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372878 | Inspection system for extreme ultraviolet (EUV) light source | Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2025-07-29 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12096543 | Method for using radiation source apparatus | Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu, Ming-Hsun Tsai +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2024-08-13 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen, Sheng-Kang Yu | 2023-01-31 |
| 11553581 | Radiation source apparatus and method for using the same | Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai, Cheng-Hao LAI +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Ming-Hsun Tsai, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI +6 more | 2022-09-13 |