Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422755 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-09-23 |
| 12405529 | Lithography system and methods | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-09-02 |
| 12372887 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2025-07-29 |
| 12372886 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Kai Tak Lam, Sagar Deepak Khivsara, Shang-Chieh Chien | 2025-07-29 |
| 12372878 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2025-07-29 |
| 12360458 | Radiation collector | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-07-15 |
| 12353142 | Semiconductor processing tool and methods of operation | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-07-08 |
| 12287572 | Lithography system and methods | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-04-29 |
| 12235593 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-02-25 |
| 12228863 | EUV light source contamination monitoring system | Cheng-Hung Tsai, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2025-02-18 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-02-04 |
| 12210295 | Reticle cleaning device and method of use | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-07 |
| 12119129 | EUV lithography apparatus | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2024-10-15 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh +5 more | 2024-09-17 |
| 12078933 | System and method for omnidirectional real time detection of photolithography characteristics | Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-03 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu, Ming-Hsun Tsai +7 more | 2024-08-20 |
| 12061423 | Method and apparatus for mitigating tin debris | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2024-08-13 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |
| 12007694 | Lithography apparatus and method | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-06-11 |
| 11948702 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-04-02 |
| 11906902 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-02-20 |
| 11852978 | EUV lithography system with 3D sensing and tunning modules | Tai-Yu Chen, Tzu-Jung Pan, Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-12-26 |
| 11854846 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2023-12-26 |