Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372880 | System and method for detecting debris in a photolithography system | Shang-Chieh Chien, Tzu-Jung Pan, Cheng-Hung Tsai, Li-Jui Chen, Heng-Hsin Liu | 2025-07-29 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2025-02-25 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Yu-Huan Chen +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Cheng-Hao LAI, Hsin-Feng Chen, Chiao-Hua Cheng +6 more | 2024-08-13 |
| 12028959 | EUV light source and apparatus for EUV lithography | Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2024-07-02 |
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2023-11-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +3 more | 2023-02-07 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Yu-Huan Chen +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Yu-Huan Chen, Ming-Hsun Tsai, Cheng-Hao LAI +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Ming-Hsun Tsai, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2022-12-13 |
| 11470710 | EUV light source and apparatus for EUV lithography | Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2022-10-11 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2022-09-13 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2021-08-10 |
| 10880980 | EUV light source and apparatus for EUV lithography | Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2020-12-29 |
| 10670970 | Lithography system and method thereof | Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2020-06-02 |