Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360464 | Lithography system and method thereof | Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2025-07-15 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12164235 | Semiconductor processing tool and methods of operation | Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2024-12-10 |
| 12009177 | Detection using semiconductor detector | Ya-Chin King, Chrong-Jung Lin, Burn Jeng Lin, Chien-Ping Wang, Chun-Lin Chang +1 more | 2024-06-11 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |
| 11803129 | Semiconductor processing tool and methods of operation | Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2023-10-10 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |
| 11520243 | Lithography system and method thereof | Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2022-12-06 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Li-Jui Chen, Po-Chung Cheng | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Han-Lung Chang, Li-Jui Chen +1 more | 2021-08-10 |
| 11029613 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2021-06-08 |
| 10779387 | Extreme ultraviolet photolithography system and method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Li-Jui Chen, Po-Chung Cheng | 2020-09-15 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2020-07-21 |
| 10670970 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Han-Lung Chang, Li-Jui Chen +1 more | 2020-06-02 |
| 10121637 | Multi-platen ion implanter and method for implanting multiple substrates simultaneously | Ming-Te Chen, Sheng-Wei Lee | 2018-11-06 |
| 9786470 | Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator | Ming-Te Chen, Sheng-Wei Lee | 2017-10-10 |
| 9606181 | Processing apparatus, ion implantation apparatus and ion implantation method | Ming-Te Chen, Sheng-Wei Lee | 2017-03-28 |
| 9357631 | Flexible printed circuit board and method for making same | MING-JAAN HO, XIAN-QIN HU, FU-YUN SHEN | 2016-05-31 |
| 9267982 | Processing apparatus and ion implantation apparatus | Ming-Te Chen, Sheng-Wei Lee | 2016-02-23 |
| 8152355 | Lamp-set structure | — | 2012-04-10 |
| 8008158 | Dopant implantation method using multi-step implants | Tse-En Chang, Chih-Fu Chang, Bone-Fong Wu, Chieh Chih Ting, Pu Chen +1 more | 2011-08-30 |
| 7857742 | Hip training apparatus | — | 2010-12-28 |