Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420313 | Onsite cleaning system and method | Yen-Hao LIU, Sung-Han Tsai, Li-Jui Chen | 2025-09-23 |
| 12360464 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2025-07-15 |
| 12362218 | Substrate holder and methods of use | Yu-Chi Tsai | 2025-07-15 |
| 12283512 | Semiconductor processing method and apparatus | Shuang Deng, Fan-Chi LIN, Li-Jui Chen, Heng-Hsin Liu | 2025-04-22 |
| 12210296 | Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuit | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2024-12-10 |
| 12009246 | Substrate holder and methods of use | Yu-Chi Tsai | 2024-06-11 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |
| 11830754 | Semiconductor processing method and apparatus | Shang-Shiuan Deng, Fan-Chi LIN, Li-Jui Chen, Heng-Hsin Liu | 2023-11-28 |
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2023-10-10 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2023-07-18 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |
| 11520243 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2022-12-06 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-07-14 |