Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354867 | Particle removal apparatus | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2025-07-08 |
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Bo-Tsun Liu +2 more | 2025-07-01 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Li-Jui Chen | 2025-01-07 |
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2024-12-10 |
| 12124178 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2024-10-22 |
| 12099310 | System and method for cleaning an EUV mask | Yen-Hui Li, Cheng-Han Yeh | 2024-09-24 |
| 11984314 | Particle removal method | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2024-05-14 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Bo-Tsun Liu +2 more | 2024-04-30 |
| 11832372 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2023-11-28 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-08-22 |
| 11723141 | EUV radiation generation methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2023-07-18 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2023-07-18 |
| 11698591 | System and method of discharging an EUV mask | Yi-Zhen Chen, Yen-Hsun Chen, Jhan-Hong YEH, Han-Lung Chang, Li-Jui Chen | 2023-07-11 |
| 11687011 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Han-Lung Chang, Li-Jui Chen | 2023-06-27 |
| 11681235 | System and method for cleaning an EUV mask | Yen-Hui Li, Cheng-Han Yeh | 2023-06-20 |
| 11681234 | Mask for attracting charged particles and method for using the same | Yen-An Chen, Li-Jui Chen, Heng-Hsin Liu, Han-Lung Chang | 2023-06-20 |
| 11675280 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2023-06-13 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Bo-Tsun Liu +2 more | 2023-02-21 |
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2022-10-25 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Bo-Tsun Liu +2 more | 2022-05-17 |