Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354867 | Particle removal apparatus | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2025-07-08 |
| 12292687 | Width adjustment of EUV radiation beam | Chi-Ming Yang, Tsung-Hsun Lee, Jian-Yuan Su, Po-Chung Cheng | 2025-05-06 |
| 12124178 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2024-10-22 |
| 12085861 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2024-09-10 |
| 11984314 | Particle removal method | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2024-05-14 |
| 11815821 | Module vessel with scrubber gutters sized to prevent overflow | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2023-11-14 |
| 11796917 | Width adjustment of EUV radiation beam | Chi-Ming Yang, Tsung-Hsun Lee, Jian-Yuan Su, Po-Chung Cheng | 2023-10-24 |
| 11675280 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2023-06-13 |
| 11573495 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2023-02-07 |
| 11221562 | Reticle and method of detecting intactness of reticle stage using the same | Chia-Yu Lee, Tao Chen, Po-Chung Cheng | 2022-01-11 |
| 11106146 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2021-08-31 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2021-07-13 |
| 10684561 | Lithography method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2020-06-16 |
| 10678148 | Lithography system and lithography method | Kai-Chieh Chang, Tsung-Hsun Lee, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10663871 | Reticle stage and method for using the same | Chia-Yu Lee, Tao Chen, Chia-Hao Hsu, Po-Chung Cheng | 2020-05-26 |
| 9235676 | Method and apparatus for optical proximity correction | Chuan-Fang Su, Chih-Chun Hsu, Hsing-Wang Chen, Rung-Shiang Chen | 2016-01-12 |