Issued Patents All Time
Showing 1–25 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400915 | Metrology method | Su-Horng Lin | 2025-08-26 |
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu | 2025-08-05 |
| 12321100 | Semiconductor lithography system and/or method | Tsiao-Chen Wu, Hsu-Shui Liu | 2025-06-03 |
| 12317576 | Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure | Chung-Chieh Lee, Chyi Shyuan Chern | 2025-05-27 |
| 12292687 | Width adjustment of EUV radiation beam | Tsung-Hsun Lee, Jian-Yuan Su, Ching-Juinn Huang, Po-Chung Cheng | 2025-05-06 |
| 12271113 | Method of manufacturing a semiconductor device | Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Ming-Hui Weng, Yen-Yu Chen +4 more | 2025-04-08 |
| 12272554 | Method of manufacturing a semiconductor device | Jia-Lin WEI, Ming-Hui Weng, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen +4 more | 2025-04-08 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12222643 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Yahru Cheng, Tze-Liang Lee +1 more | 2025-02-11 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2025-01-07 |
| 12159787 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Yahru Cheng, Tze-Liang Lee +1 more | 2024-12-03 |
| 12153346 | Photoresist for semiconductor fabrication | Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen, Jr-Hung Li, Tze-Liang Lee | 2024-11-26 |
| 12135501 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more | 2024-11-05 |
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Hsin-Feng Chen, Li-Jui Chen | 2024-10-29 |
| 12085861 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Ching-Juinn Huang, Po-Chung Cheng | 2024-09-10 |
| 12085585 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2024-09-10 |
| 12057315 | Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern | Yi-Chen Kuo, Chih-Cheng Liu, Ming-Hui Weng, Jia-Lin WEI, Yen-Yu Chen +4 more | 2024-08-06 |
| 12055865 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu | 2024-08-06 |
| 12044966 | Photoresist for semiconductor fabrication | Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen, Jr-Hung Li, Tze-Liang Lee | 2024-07-23 |
| 12007694 | Lithography apparatus and method | Wei-Chun Yen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-06-11 |
| 11999027 | Method for polishing semiconductor substrate | James Jeng-Jyi Hwang, He Hui Peng, Jiann Lih Wu | 2024-06-04 |
| 11921430 | Semiconductor lithography system and/or method | Tsiao-Chen Wu, Hsu-Shui Liu | 2024-03-05 |
| 11908700 | Method for manufacturing semiconductor structure | Nai-Han Cheng | 2024-02-20 |
| 11822237 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more | 2023-11-21 |
| 11815821 | Module vessel with scrubber gutters sized to prevent overflow | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Ching-Juinn Huang, Po-Chung Cheng | 2023-11-14 |