Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158434 | Broadband wafer defect detection | Hsing-Piao Hsu | 2024-12-03 |
| 11961707 | Ion implantation gas supply system | Hsing-Piao Hsu, Ping-Chih Ou | 2024-04-16 |
| 11908700 | Method for manufacturing semiconductor structure | Chi-Ming Yang | 2024-02-20 |
| 11852593 | Broadband wafer defect detection | Hsing-Piao Hsu | 2023-12-26 |
| 11527382 | Ion implantation gas supply system | Hsing-Piao Hsu, Ping-Chih Ou | 2022-12-13 |
| 11482422 | Method for manufacturing semiconductor structure | Chi-Ming Yang | 2022-10-25 |
| 11282673 | Ion implantation system and source bushing thereof | Ying Meng, Chui-Ya Peng | 2022-03-22 |
| 11081315 | Ion impantation gas supply system | Hsing-Piao Hsu, Ping-Chih Ou | 2021-08-03 |
| 11075097 | 3D IC bump height metrology APC | Chi-Ming Yang | 2021-07-27 |
| 11060980 | Broadband wafer defect detection | Hsing-Piao Hsu | 2021-07-13 |
| 10784079 | Ion implantation system and source bushing thereof | Ying Meng, Chui-Ya Peng | 2020-09-22 |
| 10763117 | Semiconductor manufacturing apparatus and method thereof | Chi-Ming Yang | 2020-09-01 |
| 10541164 | 3D IC bump height metrology APC | Chi-Ming Yang | 2020-01-21 |
| 10269530 | Ion beam source for semiconductor ion implantation | Hsing-Piao Hsu, Shih-Fang Chen | 2019-04-23 |
| 10181415 | 3D IC bump height metrology APC | Chi-Ming Yang | 2019-01-15 |
| 9929045 | Defect inspection and repairing method and associated system and non-transitory computer readable medium | Chi-Ming Yang | 2018-03-27 |
| 9892931 | Semiconductor manufacturing apparatus and method thereof | Chi-Ming Yang | 2018-02-13 |
| 9892954 | Wafer processing system using multi-zone chuck | Chi-Ming Yang, You-Hua Chou, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2018-02-13 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Chun-Lin Chang, Chi-Ming Yang, Chin-Hsiang Lin | 2018-01-09 |
| 9859139 | 3D IC bump height metrology APC | Chi-Ming Yang | 2018-01-02 |
| 9805913 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chih-Hong Hwang, Chun-Lin Chang, Chi-Ming Yang, Chin-Hsiang Lin | 2017-10-31 |
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Chi-Ming Yang, Chin-Hsiang Lin | 2016-09-20 |
| 9315892 | Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure | Chi-Ming Yang | 2016-04-19 |
| 9239192 | Substrate rapid thermal heating system and methods | Chi-Ming Yang | 2016-01-19 |
| 9218938 | Beam monitoring device, method, and system | — | 2015-12-22 |