Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837663 | Via structure with low resistivity and method for forming the same | Kuo-Chiang Tsai, Fu-Hsiang Su, Ke-Jing Yu, Jyh-Huei Chen | 2023-12-05 |
| 11081585 | Via structure with low resistivity and method for forming the same | Kuo-Chiang Tsai, Fu-Hsiang Su, Ke-Jing Yu, Jyh-Huei Chen | 2021-08-03 |
| 10693004 | Via structure with low resistivity and method for forming the same | Kuo-Chiang Tsai, Fu-Hsiang Su, Ke-Jing Yu, Jyh-Huei Chen | 2020-06-23 |
| 9865429 | Ion implantation with charge and direction control | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2018-01-09 |
| 9805913 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2017-10-31 |
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2016-09-20 |
| 9330901 | Nitrogen-containing oxide film and method of forming the same | An-Chun Tu, Yi Hsien Lu, Chun-Heng Chen, Chen LI, Chih-Jen Wu +2 more | 2016-05-03 |
| 9070534 | Ion beam dimension control for ion implantation process and apparatus, and advanced process control | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2015-06-30 |
| 9053907 | System and method of ion neutralization with multiple-zoned plasma flood gun | Chun-Lin Chang, Wen-Yu Ku, Chi-Ming Yang, Chin-Hsiang Lin | 2015-06-09 |
| 9031684 | Multi-factor advanced process control method and system for integrated circuit fabrication | Nai-Han Cheng, Chin-Hsiang Lin, Chi-Ming Yang, Chun-Lin Chang | 2015-05-12 |
| 9006676 | Apparatus for monitoring ion implantation | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2015-04-14 |
| 8922122 | Ion implantation with charge and direction control | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2014-12-30 |
| 8766207 | Beam monitoring device, method, and system | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2014-07-01 |
| 8664622 | System and method of ion beam source for semiconductor ion implantation | Chun-Lin Chang, Chi-Ming Yang, Chin-Hsiang Lin, Wen-Yu Ku | 2014-03-04 |
| 8592785 | Multi-ion beam implantation apparatus and method | Nai-Han Cheng, Chin-Hsiang Lin, Chi-Ming Yang, Chun-Lin Chang | 2013-11-26 |
| 8581204 | Apparatus for monitoring ion implantation | Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang, Chin-Hsiang Lin | 2013-11-12 |