Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198953 | System and method for operating the same | Jia-Rong XIAO, Wei Huang, Sen-Yeo PENG | 2025-01-14 |
| 12080567 | Systems and methods for in-situ Marangoni cleaning | Wei-Chun Hsu, Shu Wang | 2024-09-03 |
| 12068179 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Yung-Li Tsai | 2024-08-20 |
| 11923210 | Systems and methods for in-situ Marangoni cleaning | Wei-Chun Hsu, Shu Wang | 2024-03-05 |
| 11855086 | Polysilicon structure including protective layer | Yu-Shao Cheng, Kung-Wei Lee, Shin-Yeu Tsai | 2023-12-26 |
| 11735440 | Automated wafer cleaning | Chun-Yu Lee, Sen-Yeo PENG | 2023-08-22 |
| 11721567 | System and method for operating the same | Jia-Rong XIAO, Wei Huang, Sen-Yeo PENG | 2023-08-08 |
| 11610825 | Method for calibrating temperature in chemical vapor deposition | Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang | 2023-03-21 |
| 11527380 | Ion implanter toxic gas delivery system | Ying Meng, Shih-Hao Lin | 2022-12-13 |
| 11411108 | Semiconductor device and manufacturing method thereof | Chih-Fen Chen, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan | 2022-08-09 |
| 11355366 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Yung-Li Tsai | 2022-06-07 |
| 11342202 | Automated wafer cleaning | Chun-Yu Lee, Sen-Yeo PENG | 2022-05-24 |
| 11282673 | Ion implantation system and source bushing thereof | Ying Meng, Nai-Han Cheng | 2022-03-22 |
| 11227780 | System and method for operating the same | Jia-Rong XIAO, Wei Huang, Sen-Yeo PENG | 2022-01-18 |
| 11162174 | Liquid delivery and vaporization apparatus and method | Hsin-Lung Yang, Chih-Ta Kuan | 2021-11-02 |
| 11139183 | Systems and methods for dry wafer transport | Tsui-Wei Wang, Yung-Li Tsai | 2021-10-05 |
| 10957697 | Polysilicon structure including protective layer | Yu-Shao Cheng, Shin-Yeu Tsai, Kung-Wei Lee | 2021-03-23 |
| 10818563 | Method for calibrating temperature in chemical vapor deposition | Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang | 2020-10-27 |
| 10818790 | Semiconductor device | Chih-Fen Chen, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan | 2020-10-27 |
| 10784079 | Ion implantation system and source bushing thereof | Ying Meng, Nai-Han Cheng | 2020-09-22 |
| 10515861 | Method for calibrating temperature in chemical vapor deposition | Chih-Fen Chen, Tsung-Ying Liu, Yeh-Hsun Fang, Bang-Yu Huang | 2019-12-24 |
| 10325796 | Apparatus and system for detecting wafer damage | Yi-Feng James Chen, Yan Cing Lin | 2019-06-18 |
| 10319857 | Semiconductor device and manufacturing method thereof | Chih-Fen Chen, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan | 2019-06-11 |
| 10050035 | Method of making protective layer over polysilicon structure | Yu-Shao Cheng, Shin-Yeu Tsai, Kung-Wei Lee | 2018-08-14 |
| 9978634 | Method for fabricating shallow trench isolation and semiconductor structure using the same | Chun-Hsu Yen, Bang-Yu Huang, Ching-Wen Chen | 2018-05-22 |