Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257610 | Apparatus and method for wafer cleaning | Bo Chen Chen, Sheng-Wei Wu | 2025-03-25 |
| 12068179 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Chui-Ya Peng | 2024-08-20 |
| 12020964 | Contamination control in semiconductor manufacturing systems | Bo Chen Chen, Sheng-Wei Wu | 2024-06-25 |
| 11958090 | Apparatus and method for wafer cleaning | Bo Chen Chen, Sheng-Wei Wu | 2024-04-16 |
| 11766703 | Apparatus and method for wafer cleaning | Bo Chen Chen, Sheng-Wei Wu | 2023-09-26 |
| 11355366 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Chui-Ya Peng | 2022-06-07 |
| 11282728 | Contamination control in semiconductor manufacturing systems | Bo Chen Chen, Sheng-Wei Wu | 2022-03-22 |
| 11139183 | Systems and methods for dry wafer transport | Tsui-Wei Wang, Chui-Ya Peng | 2021-10-05 |
| 10943804 | Monitoring of process chamber | Bo Chen Chen, Sheng-Wei Wu | 2021-03-09 |
| 9583352 | Method of etching and cleaning wafers | Wen-Chang Tsai, Shao-Yen Ku, Hsieh-Ching Wei, Yuan-Chih Chiang, Jui-Chuan Chang | 2017-02-28 |
| 9136149 | Loading port, system for etching and cleaning wafers and method of use | Wen-Chang Tsai, Shao-Yen Ku, Hsieh-Ching Wei, Yuan-Chih Chiang, Jui-Chuan Chang | 2015-09-15 |