Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12090527 | Method and system for processing substrate in semiconductor fabrication | Chun-Syuan Jhuan, Ming-Jung Chen, Tsai-Pao Su | 2024-09-17 |
| 11664235 | Photoresist removal | Shang-Yuan Yu, Hsiao Chien-Wen, Jui-Chuan Chang, Shao-Fu Hsu, Wen-Chang Tsai +1 more | 2023-05-30 |
| 11090696 | Apparatus and method of removing photoresist layer | Jui-Chuan Chang, Wen-Chang Tsai, Shang-Yuan Yu, Chien-Wen Hsiao, Fan-Yi Hsu | 2021-08-17 |
| 10780461 | Methods for processing substrate in semiconductor fabrication | Chun-Syuan Jhuan, Ming-Jung Chen, Tsai-Pao Su | 2020-09-22 |
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Chien-Wen Hsiao, Tzu-Yang Chung, Shang-Yuan Yu, Wagner Chang | 2019-12-17 |
| 10497557 | Integrated platform for improved wafer manufacturing quality | Tsai-Pao Su, Wen-Chang Tsai, Chia-Wen Li, Yu-Yen Hsu | 2019-12-03 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Jui-Chuan Chang, Wen-Chang Tsai, Shang-Yuan Yu, Chien-Wen Hsiao, Fan-Yi Hsu | 2019-11-26 |
| 10276469 | Method for forming semiconductor device structure | Weibo Yu, Jui-Ping Chuang, Chen-Hsiang Lu | 2019-04-30 |
| 10161545 | Chemical dispense system with reduced contamination | Rong Pan, Yung-Long Chen, Heng-Yi Tzeng, Chih-Chiang Tseng | 2018-12-25 |
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Ming-Jung Chen, Tzu-Yang Chung, Chi-Yun Tseng, Rui-Ping Chuang | 2018-06-12 |
| 9887095 | System and method for an etch process with silicon concentration control | Fu Yi Chang, Yih-Song Chiu | 2018-02-06 |
| 9881816 | Cleaning composition and method for semiconductor device fabrication | Chia-Wen Li, Bo-Wei Chou, Chen Ming-Jung | 2018-01-30 |
| 9805946 | Photoresist removal | Shang-Yuan Yu, Hsiao Chien-Wen, Shao-Fu Hsu, Yuan-Chih Chiang, Wen-Chang Tsai +1 more | 2017-10-31 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Ming-Te Chen, Chi-Fu Yu, Tzu-Yang Chung, Hsiao Chien-Wen +1 more | 2017-10-10 |
| 9764364 | Apparatus and methods for movable megasonic wafer probe | Ying-Hsueh Chang Chien, Chin-Hsiang Lin, Chi-Ming Yang, Ming-Hsi Yeh | 2017-09-19 |
| 9728533 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacture | Chun-Li Chou, Pei-Hung Chen, Jui-Ping Chuang | 2017-08-08 |
| 9704714 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Weibo Yu, Jui-Ping Chuang, Chen-Hsiang Lu | 2017-07-11 |
| 9601360 | Wafer transport method | Jyun-Chao Chen, Ming-Jung Chen, Tsai-Pao Su | 2017-03-21 |
| 9583352 | Method of etching and cleaning wafers | Wen-Chang Tsai, Hsieh-Ching Wei, Yuan-Chih Chiang, Jui-Chuan Chang, Yung-Li Tsai | 2017-02-28 |
| 9494261 | Chemical dispense system with reduced contamination | Rong Pan, Yung-Long Chen, Heng-Yi Tzeng, Chih-Chiang Tseng | 2016-11-15 |
| 9478444 | Mechanisms for cleaning wafer and scrubber | Tai-Liang Lyu, Tzu-Yang Chung, Chia-Ming Tai, Chao-Hui Kuo | 2016-10-25 |
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Chien-Wen Hsiao, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |
| 9263337 | Semiconductor device and method of manufacture | Chun-Li Chou, Chi-Yun Tseng, Yu-Yen Hsu, Tsai-Pao Su, Hobin Chen +1 more | 2016-02-16 |
| 9136149 | Loading port, system for etching and cleaning wafers and method of use | Wen-Chang Tsai, Hsieh-Ching Wei, Yuan-Chih Chiang, Jui-Chuan Chang, Yung-Li Tsai | 2015-09-15 |
| 9117760 | Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing | Yu-Yen Hsu, Chun-Li Chou, Tsai-Pao Su | 2015-08-25 |