Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12090527 | Method and system for processing substrate in semiconductor fabrication | Chun-Syuan Jhuan, Ming-Jung Chen, Shao-Yen Ku | 2024-09-17 |
| 10780461 | Methods for processing substrate in semiconductor fabrication | Chun-Syuan Jhuan, Ming-Jung Chen, Shao-Yen Ku | 2020-09-22 |
| 10497557 | Integrated platform for improved wafer manufacturing quality | Shao-Yen Ku, Wen-Chang Tsai, Chia-Wen Li, Yu-Yen Hsu | 2019-12-03 |
| 9601360 | Wafer transport method | Jyun-Chao Chen, Ming-Jung Chen, Shao-Yen Ku | 2017-03-21 |
| 9263337 | Semiconductor device and method of manufacture | Chun-Li Chou, Shao-Yen Ku, Chi-Yun Tseng, Yu-Yen Hsu, Hobin Chen +1 more | 2016-02-16 |
| 9117760 | Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing | Yu-Yen Hsu, Shao-Yen Ku, Chun-Li Chou | 2015-08-25 |
| 9064807 | Integrated platform for improved wafer manufacturing quality | Shao-Yen Ku, Wen-Chang Tsai, Chia-Wen Li, Yu-Yen Hsu | 2015-06-23 |