Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497557 | Integrated platform for improved wafer manufacturing quality | Shao-Yen Ku, Tsai-Pao Su, Wen-Chang Tsai, Chia-Wen Li | 2019-12-03 |
| 9263337 | Semiconductor device and method of manufacture | Chun-Li Chou, Shao-Yen Ku, Chi-Yun Tseng, Tsai-Pao Su, Hobin Chen +1 more | 2016-02-16 |
| 9117760 | Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing | Shao-Yen Ku, Chun-Li Chou, Tsai-Pao Su | 2015-08-25 |
| 9064807 | Integrated platform for improved wafer manufacturing quality | Shao-Yen Ku, Tsai-Pao Su, Wen-Chang Tsai, Chia-Wen Li | 2015-06-23 |
| 9048089 | Apparatus to improve internal wafer temperature profile | Shao-Yen Ku, Chun-Li Chou | 2015-06-02 |