Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Shao-Yen Ku, Ming-Jung Chen, Tzu-Yang Chung, Rui-Ping Chuang | 2018-06-12 |
| 9263337 | Semiconductor device and method of manufacture | Chun-Li Chou, Shao-Yen Ku, Yu-Yen Hsu, Tsai-Pao Su, Hobin Chen +1 more | 2016-02-16 |
| 6206441 | Apparatus and method for transferring wafers by robot | Ming-Chien Wen, Chuan-Yuan Lu, Su-Yi Doung | 2001-03-27 |