Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7316240 | Exhaust system and mini-exhaust static pressure controlling apparatus thereof | Po-Sung Kuo, Yung-Dar Chen, Dar-Rung Kuo, Ming-Tsong Wang | 2008-01-08 |
| 6775918 | Wafer cassette pod equipped with position sensing device | Hisen-Hwa Tseng, Chia-Hung Chung | 2004-08-17 |
| 6206441 | Apparatus and method for transferring wafers by robot | Chuan-Yuan Lu, Chi-Yun Tseng, Su-Yi Doung | 2001-03-27 |
| 6113165 | Self-sensing wafer holder and method of using | Ching Hsu Ho, Yu Fu, Kwen Sz Lin | 2000-09-05 |
| 5792237 | Method and apparatus for eliminating trapped air from a liquid flow | Cheng-Chieh Hung, Mao-sheng Chuang | 1998-08-11 |