Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899368 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Ko-Bin Kao, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2024-02-13 |
| 11454891 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Ko-Bin Kao, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2022-09-27 |
| 11061333 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Ko-Bin Kao, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2021-07-13 |
| 11004709 | Method for monitoring gas in wafer processing system | Wen-Chieh Hsieh, Su-Yu Yeh, Ko-Bin Kao, Li-Jen Wu, Chun-Yu Chen +2 more | 2021-05-11 |
| 10943802 | Photoresist bottle container | Yu-Kai Chen, Ko-Bin Kao, Shi-Ming Wang, Su-Yu Yeh, Li-Jen Wu +2 more | 2021-03-09 |
| 8748885 | Soft material wafer bonding and method of bonding | Tung-Ti Yeh, Chung-Yi Huang, Ya-Wen Wu, Hui Mei Jao, Ting-Chun Wang +1 more | 2014-06-10 |
| 8592297 | Wafer and method of processing wafer | Tung-Ti Yeh, Wu-Chang Lin, Chung-Yi Huang, Ya-Wen Wu, Hui Mei Jao +1 more | 2013-11-26 |
| 7254513 | Fault detection and classification (FDC) specification management apparatus and method thereof | Mu-Tsang Lin, Yi-Yu Wu, Jian-Hong Chen, Chon-Hwa Chu, Ie-Fun Lai +1 more | 2007-08-07 |
| 6938505 | Chamber wafer detection | Kuen-Ei Chen, Yu-Yi Wu | 2005-09-06 |
| 6775918 | Wafer cassette pod equipped with position sensing device | Hisen-Hwa Tseng, Ming-Chien Wen | 2004-08-17 |
| 6755602 | Wafer transport pod with linear door opening mechanism | Hsien-Hua Tseng | 2004-06-29 |