Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7187184 | Prevention of robot damage via capacitive sensor assembly | Feng-Cheng Kuo, Shan-Ching Lin | 2007-03-06 |
| 6949938 | Prevention of robot damage via capacitive sensor assembly | Feng-Cheng Kuo, Shan-Ching Lin | 2005-09-27 |
| 6938505 | Chamber wafer detection | Yu-Yi Wu, Chia-Hung Chung | 2005-09-06 |
| 6745901 | Wafer cassette equipped with piezoelectric sensors | Hung-Shan Lan | 2004-06-08 |