Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Chien-Wen Hsiao, Shao-Yen Ku, Shang-Yuan Yu, Wagner Chang | 2019-12-17 |
| 9997384 | Methods for transporting wafers between wafer holders and chambers | Shao-Yen Ku, Ming-Jung Chen, Chi-Yun Tseng, Rui-Ping Chuang | 2018-06-12 |
| 9781994 | Wafer cleaning | Shang-Yuan Yu, Ming-Te Chen, Chi-Fu Yu, Shao-Yen Ku, Hsiao Chien-Wen +1 more | 2017-10-10 |
| 9478444 | Mechanisms for cleaning wafer and scrubber | Tai-Liang Lyu, Shao-Yen Ku, Chia-Ming Tai, Chao-Hui Kuo | 2016-10-25 |
| 6360756 | Wafer rinse tank for metal etching and method for using | Chie-Chi Chen, Szu-Yao Wang, Sheng-Liang Pan | 2002-03-26 |