Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11090696 | Apparatus and method of removing photoresist layer | Jui-Chuan Chang, Shao-Yen Ku, Wen-Chang Tsai, Shang-Yuan Yu, Fan-Yi Hsu | 2021-08-17 |
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Shao-Yen Ku, Tzu-Yang Chung, Shang-Yuan Yu, Wagner Chang | 2019-12-17 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Jui-Chuan Chang, Shao-Yen Ku, Wen-Chang Tsai, Shang-Yuan Yu, Fan-Yi Hsu | 2019-11-26 |
| 9349617 | Mechanisms for wafer cleaning | Shang-Yuan Yu, Shao-Yen Ku, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |