Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053745 | System for storing chemical liquid and method for adjusting gas concentration in chemical liquid | Chun-Yu Kuo, Shang-Yun HUANG, Weibo Yu | 2024-08-06 |
| 11664235 | Photoresist removal | Hsiao Chien-Wen, Jui-Chuan Chang, Shao-Fu Hsu, Shao-Yen Ku, Wen-Chang Tsai +1 more | 2023-05-30 |
| 11090696 | Apparatus and method of removing photoresist layer | Jui-Chuan Chang, Shao-Yen Ku, Wen-Chang Tsai, Chien-Wen Hsiao, Fan-Yi Hsu | 2021-08-17 |
| 10510527 | Single wafer cleaning tool with H2SO4 recycling | Chien-Wen Hsiao, Shao-Yen Ku, Tzu-Yang Chung, Wagner Chang | 2019-12-17 |
| 10486204 | Semiconductor apparatus and method of removing photoresist layer on substrate | Jui-Chuan Chang, Shao-Yen Ku, Wen-Chang Tsai, Chien-Wen Hsiao, Fan-Yi Hsu | 2019-11-26 |
| 9805946 | Photoresist removal | Shao-Yen Ku, Hsiao Chien-Wen, Shao-Fu Hsu, Yuan-Chih Chiang, Wen-Chang Tsai +1 more | 2017-10-31 |
| 9781994 | Wafer cleaning | Ming-Te Chen, Chi-Fu Yu, Shao-Yen Ku, Tzu-Yang Chung, Hsiao Chien-Wen +1 more | 2017-10-10 |
| 9349617 | Mechanisms for wafer cleaning | Shao-Yen Ku, Chien-Wen Hsiao, Hong-Jie Xu, Jui-Chuan Chang, Wen-Chang Tsai | 2016-05-24 |