Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053745 | System for storing chemical liquid and method for adjusting gas concentration in chemical liquid | Chun-Yu Kuo, Shang-Yun HUANG, Shang-Yuan Yu | 2024-08-06 |
| 10840102 | Integrated system, integrated system operation method and film treatment method | Wen-Yu Ku, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2020-11-17 |
| 10276469 | Method for forming semiconductor device structure | Jui-Ping Chuang, Chen-Hsiang Lu, Shao-Yen Ku | 2019-04-30 |
| 9776216 | Dispensing apparatus and dispensing method | Kuo-Sheng Chuang, Wen-Yu Ku, Chin-Hsiang Lin | 2017-10-03 |
| 9704714 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Jui-Ping Chuang, Chen-Hsiang Lu, Shao-Yen Ku | 2017-07-11 |
| 9355874 | Silicon nitride etching in a single wafer apparatus | Hsueh-Chin Lu, Han-Guan Chew, Kuo-Bin Huang, Chao-Cheng Chen, Syun-Ming Jang | 2016-05-31 |
| 8932962 | Chemical dispensing system and method | Kuo-Bin Huang, Chao-Cheng Chen, Syun-Ming Jang | 2015-01-13 |
| 8735252 | Method of semiconductor integrated circuit fabrication | Ming-Hsi Yeh, Chih-Tang Peng, Hao-Ming Lien, Chao-Cheng Chen, Syun-Ming Jang | 2014-05-27 |