Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355874 | Silicon nitride etching in a single wafer apparatus | Weibo Yu, Hsueh-Chin Lu, Kuo-Bin Huang, Chao-Cheng Chen, Syun-Ming Jang | 2016-05-31 |
| 9105692 | Method of fabricating an interconnection structure in a CMOS comprising a step of forming a dummy electrode | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2015-08-11 |
| 8835294 | Method for improving thermal stability of metal gate | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang, Yi-Ren Chen | 2014-09-16 |
| 8668833 | Method of forming a nanostructure | Fei Zheng, Wee Kiong Choi, Tze Haw Liew | 2014-03-11 |
| 8664079 | Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2014-03-04 |
| 8609484 | Method for forming high-K metal gate device | Lee-Wee Tao, Harry-Hak-Lay Chuang, Syun-Ming Jang | 2013-12-17 |
| 8586428 | Interconnection structure for N/P metal gates | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2013-11-19 |
| 8415236 | Methods for reducing loading effects during film formation | Jinping Liu, Alex See, Mei Sheng Zhou | 2013-04-09 |
| 8378428 | Metal gate structure of a semiconductor device | Lee-Wee Teo, Ming Zhu, Bao-Ru Young, Harry-Hak-Lay Chuang | 2013-02-19 |
| 8304831 | Method and apparatus of forming a gate | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2012-11-06 |
| 8304842 | Interconnection structure for N/P metal gates | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2012-11-06 |
| 8143137 | Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate | Ming Zhu, Lee-Wee Teo, Harry-Hak-Lay Chuang | 2012-03-27 |