Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940737 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2024-03-26 |
| 11682716 | Structure of semiconductor device structure having fins | Che-Cheng Chang, Chen-Hsiang Lu, Yu-Cheng Liu, Wei-Ting Chen | 2023-06-20 |
| 11150558 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2021-10-19 |
| 11003091 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2021-05-11 |
| 10686059 | Structure of semiconductor device structure having fins | Che-Cheng Chang, Chen-Hsiang Lu, Yu-Cheng Liu, Wei-Ting Chen | 2020-06-16 |
| 10686060 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2020-06-16 |
| 10627718 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2020-04-21 |
| 10534272 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2020-01-14 |
| 10326005 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2019-06-18 |
| 10276469 | Method for forming semiconductor device structure | Weibo Yu, Chen-Hsiang Lu, Shao-Yen Ku | 2019-04-30 |
| 10101662 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2018-10-16 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2018-09-11 |
| 10014394 | Structure and formation method of semiconductor device with metal gate | Che-Cheng Chang, Chen-Hsiang Lu, Yu-Cheng Liu, Wei-Ting Chen | 2018-07-03 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Hsueh-Yi Chung, Shang-Yun HUANG, Li-Kong Turn, Fei-Gwo Tsai | 2018-03-06 |
| 9899271 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2018-02-20 |
| 9733568 | Tool and method of developing | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2017-08-15 |
| 9728533 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacture | Chun-Li Chou, Shao-Yen Ku, Pei-Hung Chen | 2017-08-08 |
| 9704714 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Weibo Yu, Chen-Hsiang Lu, Shao-Yen Ku | 2017-07-11 |
| 9559205 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2017-01-31 |
| 9553090 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2017-01-24 |
| 8916429 | Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing | Chun-Li Chou, Shao-Yen Ku, Pei-Hung Chen | 2014-12-23 |
| 6716740 | Method for depositing silicon oxide incorporating an outgassing step | Shih-Ming Wang, Long-Shang Chuang, Chin-Hsiung Ho, Mei-Yen Li, Chien-Kang Chou | 2004-04-06 |
| 6553335 | Method and apparatus for determining end-point in a chamber cleaning process | Jim-Jey Huang, Tain-Chen Hu | 2003-04-22 |
| 6524959 | Chemical mechanical polish (CMP) planarizing method employing derivative signal end-point monitoring and control | Chen-Fa Lu, Chen-Peng Fan, Tien-Chen Hu | 2003-02-25 |
| 6429130 | Method and apparatus for end point detection in a chemical mechanical polishing process using two laser beams | — | 2002-08-06 |