Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7439154 | Method of fabricating interconnect structure | Feng-Yu Hsu, Chih-Chien Liu, Jei-Ming Chen | 2008-10-21 |
| 6553335 | Method and apparatus for determining end-point in a chamber cleaning process | Tain-Chen Hu, Jui-Ping Chuang | 2003-04-22 |