Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027407 | Substrate support apparatus and method | Yueh-Lin Yang, Chi-Hung Liao | 2024-07-02 |
| 11940737 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2024-03-26 |
| 11150558 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2021-10-19 |
| 11003091 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2021-05-11 |
| 10627718 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2020-04-21 |
| 10534272 | Method of fabricating reticle | Hsueh-Yi Chung, Yung-Cheng Chen, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2020-01-14 |
| 10101662 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2018-10-16 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2018-09-11 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Hsueh-Yi Chung, Shang-Yun HUANG, Jui-Ping Chuang, Li-Kong Turn | 2018-03-06 |
| 9733568 | Tool and method of developing | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2017-08-15 |
| 9618855 | Lithography system and method for mask inspection | Bo-Tsun Liu, Chieh-Huan Ku | 2017-04-11 |
| 9466101 | Detection of defects on wafer during semiconductor fabrication | Chun-Hsien Lin, Liu Bo-Tsun, Chin-Ti Ko, Wu Cheng-Hung, Kuo-Hung Chao +3 more | 2016-10-11 |
| 9188876 | Method of determining overlay error and control system for dynamic control of reticle position | Yung-Yao Lee, Sophia Wang, Heng-Hsin Liu | 2015-11-17 |
| 9081306 | Method of optimizing lithography tools utilization | Yao-Hwan Kao, Li-Kong Tum, Ching-Hai Yang, Steven Liu | 2015-07-14 |
| 8709267 | Double patterning method using tilt-angle deposition | Chwen Yu, Kai-Wen Cheng | 2014-04-29 |
| 8624338 | Multi-nanometer-projection apparatus for lithography, oxidation, inspection, and measurement | Chwen Yu | 2014-01-07 |
| 8202681 | Hybrid multi-layer mask | Feng-Lung Lin, Kuan-Liang Wu, Che-Rong Liang | 2012-06-19 |
| 8007966 | Multiple technology node mask | Feng-Lung Lin, Kuan-Liang Wu, Che-Rong Liang | 2011-08-30 |
| 8003281 | Hybrid multi-layer mask | Feng-Lung Lin, Kuan-Liang Wu, Che-Rong Liang | 2011-08-23 |
| 7875406 | Multiple technology node mask | Feng-Lung Lin, Kuan-Liang Wu, Che-Rong Liang | 2011-01-25 |
| 7871742 | Method for controlling phase angle of a mask by post-treatment | Chun-Lang Chen, Tran-Hui Shen, Chien-Chao Huang | 2011-01-18 |
| 7368229 | Composite layer method for minimizing PED effect | Chun-Lang Chen | 2008-05-06 |
| 7244533 | Method of the adjustable matching map system in lithography | — | 2007-07-17 |
| 7241541 | Method of the adjustable matching map system in lithography | — | 2007-07-10 |
| 7160654 | Method of the adjustable matching map system in lithography | — | 2007-01-09 |