Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400866 | Method and system for manufacturing a semiconductor device | Ching-Hai Yang | 2025-08-26 |
| 12265327 | Semiconductor manufacturing apparatus and method thereof | Ching-Hai Yang | 2025-04-01 |
| 12019370 | Method and system for manufacturing a semiconductor device | Wei Huang, Hao Chang | 2024-06-25 |
| 11806743 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2023-11-07 |
| 11344910 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2022-05-31 |
| 9855579 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2018-01-02 |
| 9793143 | Semiconductor processing apparatus and method of operating the same | Ching-Hai Yang, Shang-Sheng Li, Yung-Chang Lu, Jian-Yuan Lai, Kai-Yuan Cheng | 2017-10-17 |
| 9589820 | Semiconductor apparatus and adjustment method | Ching-Hai Yang, Po-Chun Lee | 2017-03-07 |
| 9536759 | Baking apparatus and method | Ching-Hai Yang, Shang-Sheng Li | 2017-01-03 |
| 9375665 | System and method for replacing resist filter to reduce resist filter-induced wafer defects | Po-Chang Huang | 2016-06-28 |
| 9081306 | Method of optimizing lithography tools utilization | Fei-Gwo Tsai, Li-Kong Tum, Ching-Hai Yang, Steven Liu | 2015-07-14 |
| 8580117 | System and method for replacing resist filter to reduce resist filter-induced wafer defects | Po-Chang Huang | 2013-11-12 |
| 7789576 | PEB embedded exposure apparatus | Feng-Ning Lee, Yung-Cheng Chen, Li-Jen Ko, Chin-Hsiang Lin | 2010-09-07 |
| 7026580 | Adjustable exhaust flow for thermal uniformity | Jia-Sheng Lee, De-Yuan Lu, Ming-Fa Chen | 2006-04-11 |
| 6927363 | Distribution manifold for exhausting photoresist vapors | Hsun-Peng Lin, Wen-Hwo Liu, Yuan-Ting Huang | 2005-08-09 |
| 6723168 | Spin-coater with self-cleaning cup and method of using | Yi-Chuan Lo | 2004-04-20 |
| 5857590 | Controlled multi-nozzle liquid dispensing system | Chi-Ren Hsieh | 1999-01-12 |