Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130553 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Yung-Yao Lee | 2024-10-29 |
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Yung-Yao Lee | 2023-12-05 |
| 11806743 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Yao-Hwan Kao, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2023-11-07 |
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Kuo-Shu Tseng, Chen Yi Hsu +1 more | 2023-09-26 |
| 11344910 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Yao-Hwan Kao, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2022-05-31 |
| 9855579 | Spin dispenser module substrate surface protection system | Ching-Hai Yang, Yao-Hwan Kao, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2018-01-02 |
| 9793143 | Semiconductor processing apparatus and method of operating the same | Ching-Hai Yang, Yao-Hwan Kao, Yung-Chang Lu, Jian-Yuan Lai, Kai-Yuan Cheng | 2017-10-17 |
| 9536759 | Baking apparatus and method | Ching-Hai Yang, Yao-Hwan Kao | 2017-01-03 |
| 8873020 | Cleaning nozzle for advanced lithography process | Ching-Hai Yang | 2014-10-28 |