Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235582 | Semiconductor developer tool and methods of operation | Yung-Yao Lee | 2025-02-25 |
| 12191146 | Method of manufacturing semiconductor structure | Yung-Yao Lee, Wei-Hsiang Tseng | 2025-01-07 |
| 12130553 | Resist pump buffer tank and method of resist defect reduction | Shang-Sheng Li, Yung-Yao Lee | 2024-10-29 |
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Shang-Sheng Li, Yung-Yao Lee | 2023-12-05 |
| 11769678 | Liquid storage for facility chemical supply system | Tzu-Yang Lin, Cheng-Han Wu, Chen-Yu Liu, Kuo-Shu Tseng, Shang-Sheng Li +1 more | 2023-09-26 |
| 11747729 | Semiconductor developer tool and methods of operation | Yung-Yao Lee | 2023-09-05 |
| 11482417 | Method of manufacturing semiconductor structure | Yung-Yao Lee, Wei-Hsiang Tseng | 2022-10-25 |
| 11181824 | Semiconductor apparatus and method for baking coating layer | Yung-Yao Lee | 2021-11-23 |
| 11163235 | Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer | Yung-Yao Lee | 2021-11-02 |
| 11048170 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Yung-Yao Lee | 2021-06-29 |
| 10691020 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Yung-Yao Lee | 2020-06-23 |
| 10234548 | Ultrasonic detection device to determine interference source by an additional reception mode | Chien-Wen Lai | 2019-03-19 |