Issued Patents All Time
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400834 | Cantilever with etch chamber flow design | Chien-Liang Chen, Chien-Yu Wang, Wei Chen, Yu-Ning Cheng, Shih-Tsung Chen | 2025-08-26 |
| 12362160 | Method for forming layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Cheng-Chieh Chen, Yi-Ming Yeh +1 more | 2025-07-15 |
| 12306542 | Immersion exposure tool | — | 2025-05-20 |
| 12292686 | Semiconductor structure and manufacturing method thereof | Yi-Ping Hsieh | 2025-05-06 |
| 12282318 | Semiconductor wafer cooling | Cheng-Kang Hu, Jui-Chun Peng, Hsu-Shui Liu | 2025-04-22 |
| 12242199 | Method of using wafer stage | Wei-Chih Lin, Chih-Chien Lin | 2025-03-04 |
| 12235582 | Semiconductor developer tool and methods of operation | Chen Yi Hsu | 2025-02-25 |
| 12191127 | Apparatus for physical vapor deposition and method for forming a layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Cheng-Chieh Chen, Yi-Ming Yeh +1 more | 2025-01-07 |
| 12189306 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2025-01-07 |
| 12191146 | Method of manufacturing semiconductor structure | Chen Yi Hsu, Wei-Hsiang Tseng | 2025-01-07 |
| 12130553 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Shang-Sheng Li | 2024-10-29 |
| 12092958 | Wafer stage and method of using | Wei-Chih Lin, Chih-Chien Lin | 2024-09-17 |
| 12048944 | Method of operating drippage prevention system | Chien-Hung Wang, Chun-Chih Lin, Chi-Hung Liao, Wei Chang Cheng | 2024-07-30 |
| 11966170 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2024-04-23 |
| 11966165 | Immersion exposure tool | — | 2024-04-23 |
| 11860547 | Extractor piping on outermost sidewall of immersion hood apparatus | Wei-Chih Lin | 2024-01-02 |
| 11835866 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2023-12-05 |
| 11835861 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Shang-Sheng Li | 2023-12-05 |
| 11768484 | Semiconductor wafer cooling | Cheng-Kang Hu, Jui-Chun Peng, Hsu-Shui Liu | 2023-09-26 |
| 11756789 | Semiconductor manufacturing method and apparatus thereof | Wen-Chih Wang | 2023-09-12 |
| 11747729 | Semiconductor developer tool and methods of operation | Chen Yi Hsu | 2023-09-05 |
| 11543754 | Extractor piping on outermost sidewall of immersion hood apparatus | Wei-Chih Lin | 2023-01-03 |
| 11500299 | Exposure method and exposure apparatus | Heng-Hsin Liu, Hung-Ming Kuo, Jui-Chun Peng | 2022-11-15 |
| 11487210 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2022-11-01 |
| 11482417 | Method of manufacturing semiconductor structure | Chen Yi Hsu, Wei-Hsiang Tseng | 2022-10-25 |