Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400313 | Optical inspection of a wafer | Chih-Lieh Chen, Cheng-Lung Wu, Jiun-Rong Pai | 2025-08-26 |
| 12346034 | Method and system of removing particles from pellicle | Yin-Yuan Chen, Ya-Chieh WEN, Hsu-Shui Liu, Jiun-Rong Pai | 2025-07-01 |
| 12334373 | Apparatus and method for inspecting wafer carriers | Shou-Wen Kuo, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2025-06-17 |
| 12322628 | Apparatus and method for automated wafer carrier handling | Ren-Hau Wu, Cheng-Lung Wu, Jiun-Rong Pai | 2025-06-03 |
| 12283506 | Humidity control device for equipment front end module of semiconductor processing or characterization tool | Ren-Hau Wu, Yi-Fam Shiu, Cheng-Lung Wu, Hsu-Shui Liu | 2025-04-22 |
| 12282318 | Semiconductor wafer cooling | Yung-Yao Lee, Jui-Chun Peng, Hsu-Shui Liu | 2025-04-22 |
| 12165906 | Apparatus and methods for handling semiconductor part carriers | Ren-Hau Wu, Yan-Han CHEN, Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai | 2024-12-10 |
| 12153433 | Systems and methods for raised floor automated sensor vehicles | Cheng-Hung Chen, Yan-Han CHEN, Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai +1 more | 2024-11-26 |
| 12125727 | Wafer transfer system and a method for transporting wafers | Ren-Hau Wu, Chieh-Chun Lin, Jia-Hong Liao, Cheng-Yi Liu | 2024-10-22 |
| 11954841 | Optical inspection of a wafer | Chih-Lieh Chen, Cheng-Lung Wu, Jiun-Rong Pai | 2024-04-09 |
| 11929271 | Apparatus and method for inspecting wafer carriers | Shou-Wen Kuo, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2024-03-12 |
| 11915958 | Apparatus and method for automated wafer carrier handling | Ren-Hau Wu, Cheng-Lung Wu, Jiun-Rong Pai | 2024-02-27 |
| 11768484 | Semiconductor wafer cooling | Yung-Yao Lee, Jui-Chun Peng, Hsu-Shui Liu | 2023-09-26 |
| 11670524 | Fully automated wafer debonding system and method thereof | Cheng-Fei Yu, Chang-Chen Tsao, Ting-Yau Shiu, Hsu-Shui Liu, Jiun-Rong Pai | 2023-06-06 |
| 11651981 | Method and system for map-free inspection of semiconductor devices | Jiao-Rou Liao, Sheng-Hsiang Chuang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2023-05-16 |
| 11423526 | Optical inspection of a wafer | Chih-Lieh Chen, Cheng-Lung Wu, Jiun-Rong Pai | 2022-08-23 |
| 11334080 | Systems and methods for raised floor automated sensor vehicles | Cheng-Hung Chen, Yan-Han CHEN, Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai +1 more | 2022-05-17 |
| 11295973 | Apparatus and method for automated wafer carrier handling | Ren-Hau Wu, Cheng-Lung Wu, Jiun-Rong Pai | 2022-04-05 |
| 11152238 | Semiconductor processing stage profiler jig | Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sheng-Hsiang Chuang, Cheng-Hung Chen | 2021-10-19 |
| 11120539 | Topological scanning method and system | Sheng-Hsiang Chuang, Jiao-Rou Liao, Shou-Wen Kuo, Jiun-Rong Pai, Hsu-Shui Liu | 2021-09-14 |
| 10971386 | Device positioning using sensors | Yan-Han CHEN, Ren-Hau Wu, Cheng-Hung Chen, Feng-Kuang Wu, Hsu-Shui Liu +2 more | 2021-04-06 |
| 10889097 | Wafer debonding system and method | Chang-Chen Tsao, Kuo-Liang Lu, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng +1 more | 2021-01-12 |
| 10714364 | Apparatus and method for inspecting wafer carriers | Shou-Wen Kuo, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2020-07-14 |
| 10569520 | Wafer debonding system and method | Chang-Chen Tsao, Kuo-Liang Lu, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng +1 more | 2020-02-25 |
| 10155369 | Wafer debonding system and method | Chang-Chen Tsao, Kuo-Liang Lu, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng +1 more | 2018-12-18 |