Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412760 | EFEM robot auto teaching methodology | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai | 2025-09-09 |
| 12378668 | Gas tube, gas supply system and manufacturing method of semiconductor device using the same | Yi-Shiung Chen, Cheng-Yi Huang, Chih-Shen Yang, Po-Wen Chai | 2025-08-05 |
| 12334373 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2025-06-17 |
| 12216407 | Method and apparatus for multi-spray RRC process with dynamic control | Ming-Hsuan Chuang, Po-Sheng Lu, Cheng-Yi Huang, Chia-Hung Chu | 2025-02-04 |
| 12191185 | Vacuum wafer chuck for manufacturing semiconductor devices | Chien-Fa Lee, Chin-Lin CHOU, Shang-Ying Tsai, Kuei-Sung Chang, Jiun-Rong Pai +2 more | 2025-01-07 |
| 12165901 | System and method for ring frame cleaning and inspection | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Jian-Hung Cheng, M. C. Lin +3 more | 2024-12-10 |
| 12153433 | Systems and methods for raised floor automated sensor vehicles | Cheng-Kang Hu, Cheng-Hung Chen, Yan-Han CHEN, Feng-Kuang Wu, Hsu-Shui Liu +1 more | 2024-11-26 |
| 12037687 | Gas tube, gas supply system and manufacturing method of semiconductor device using the same | Yi-Shiung Chen, Cheng-Yi Huang, Chih-Shen Yang, Po-Wen Chai | 2024-07-16 |
| 11984331 | EFEM robot auto teaching methodology | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai | 2024-05-14 |
| 11961770 | Automated inspection tool | Chia-Han Lin, Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang +9 more | 2024-04-16 |
| 11929271 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2024-03-12 |
| 11842481 | Defect offset correction | Chien-Ko Liao, Ya Hsun Hsueh, Sheng-Hsiang Chuang, Hsu-Shui Liu, Jiun-Rong Pai | 2023-12-12 |
| 11764097 | System and method for ring frame cleaning and inspection | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Jian-Hung Cheng, M. C. Lin +3 more | 2023-09-19 |
| 11754989 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Sing-Tsung Li, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Chien-Ko Liao | 2023-09-12 |
| 11699619 | Automated transfer and drying tool for process chamber | Tsung-Sheng Kuo, Hsu-Shui Liu, Jiun-Rong Pai, Yang-Ann Chu | 2023-07-11 |
| 11651981 | Method and system for map-free inspection of semiconductor devices | Jiao-Rou Liao, Sheng-Hsiang Chuang, Cheng-Kang Hu, Hsu-Shui Liu, Jiun-Rong Pai | 2023-05-16 |
| 11592748 | Method and apparatus for multi-spray RRC process with dynamic control | Ming-Hsuan Chuang, Po-Sheng Lu, Cheng-Yi Huang, Chia-Hung Chu | 2023-02-28 |
| 11545382 | Integrated chip die carrier exchanger | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Pin-Yi Hsin, Patrick Lin | 2023-01-03 |
| 11508608 | Vacuum wafer chuck for manufacturing semiconductor devices | Chien-Fa Lee, Chin-Lin CHOU, Shang-Ying Tsai, Kuei-Sung Chang, Jiun-Rong Pai +2 more | 2022-11-22 |
| 11430108 | Defect offset correction | Chien-Ko Liao, Ya Hsun Hsueh, Sheng-Hsiang Chuang, Hsu-Shui Liu, Jiun-Rong Pai | 2022-08-30 |
| 11414757 | Gas tube, gas supply system and manufacturing method of semiconductor device using the same | Yi-Shiung Chen, Cheng-Yi Huang, Chih-Shen Yang, Po-Wen Chai | 2022-08-16 |
| 11334080 | Systems and methods for raised floor automated sensor vehicles | Cheng-Kang Hu, Cheng-Hung Chen, Yan-Han CHEN, Feng-Kuang Wu, Hsu-Shui Liu +1 more | 2022-05-17 |
| 11171065 | Automated inspection tool | Chia-Han Lin, Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang +9 more | 2021-11-09 |
| 11152238 | Semiconductor processing stage profiler jig | Cheng-Kang Hu, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Cheng-Hung Chen | 2021-10-19 |
| 11120539 | Topological scanning method and system | Sheng-Hsiang Chuang, Jiao-Rou Liao, Cheng-Kang Hu, Jiun-Rong Pai, Hsu-Shui Liu | 2021-09-14 |