Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216407 | Method and apparatus for multi-spray RRC process with dynamic control | Po-Sheng Lu, Shou-Wen Kuo, Cheng-Yi Huang, Chia-Hung Chu | 2025-02-04 |
| 11592748 | Method and apparatus for multi-spray RRC process with dynamic control | Po-Sheng Lu, Shou-Wen Kuo, Cheng-Yi Huang, Chia-Hung Chu | 2023-02-28 |
| 10649336 | Method and system for fabricating semiconductor device | Jun-Yih Yu, Chang-Fa Lin, Ching-Hung Cheng, Yi-Chuan Lo | 2020-05-12 |