Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880140 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2024-01-23 |
| 11520237 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2022-12-06 |
| 11003089 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2021-05-11 |
| 10948816 | Pellicle frame and pellicle | Yoshihiro Taguchi, Takayuki Yamaguchi, Yasuo Ishiwata | 2021-03-16 |
| 10663868 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2020-05-26 |
| 10649336 | Method and system for fabricating semiconductor device | Chang-Fa Lin, Ching-Hung Cheng, Yi-Chuan Lo, Ming-Hsuan Chuang | 2020-05-12 |
| 10274830 | Method and apparatus for dynamic lithographic exposure | De-Fang Huang, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2019-04-30 |