Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11880140 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2024-01-23 |
| 11520237 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2022-12-06 |
| 11003089 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2021-05-11 |
| 10663868 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2020-05-26 |
| 10274830 | Method and apparatus for dynamic lithographic exposure | Jun-Yih Yu, De-Chen Tseng, Jia-Feng Chang, Li-Fang Hsu | 2019-04-30 |
| 9952520 | Method for semiconductor wafer alignment | Shing-Kuei Lai, Wei-Yueh Tseng, Hsiao-Yi Wang | 2018-04-24 |
| 9601436 | Method for semiconductor wafer alignment | Shing-Kuei Lai, Wei-Yueh Tseng, Hsiao-Yi Wang | 2017-03-21 |
| 9541836 | Method and apparatus for baking photoresist patterns | Chin-Min Lin, Ching-Hui Tsao | 2017-01-10 |
| 7456079 | EPI wafer and method of making the same | Hsueh-Liang Chou | 2008-11-25 |