Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057301 | Arcing protection method, processing tool and fabrication system | Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng Li, Zheng Xu, Chih-Kuo Chang +2 more | 2024-08-06 |
| 11754989 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao | 2023-09-12 |
| 11664206 | Arcing protection method and processing tool | Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng Li, Zheng Xu, Chih-Kuo Chang +2 more | 2023-05-30 |
| 11437843 | Under-floor charging station | Cheng-Lung Wu, Ren-Hau Wu, Yang-Ann Chu, Jiun-Rong Pai, Feng-Kuang Wu | 2022-09-06 |
| 10852704 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Shou-Wen Kuo, Chien-Ko Liao | 2020-12-01 |
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2020-08-04 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2020-02-11 |
| 10390705 | Portable noninvasive inspection device | Mang Ou-Yang, Ting-Wei Huang, CHIN-SIANG YANG, Yao-Fang Hsieh, Jin-Chern Chiou +6 more | 2019-08-27 |
| 10170287 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2019-01-01 |