Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217991 | Portable robotic semiconductor pod loader | Cheng-Lung Wu, Ting-Yau Shiu, Wei-Chen Lee, Yang-Ann Chu, Jiun-Rong Pai | 2025-02-04 |
| 12057301 | Arcing protection method, processing tool and fabrication system | Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng Li, Zheng Xu, Sing-Tsung Li +2 more | 2024-08-06 |
| 11664206 | Arcing protection method and processing tool | Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng Li, Zheng Xu, Sing-Tsung Li +2 more | 2023-05-30 |
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li | 2020-08-04 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li | 2020-02-11 |
| 10170287 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sing-Tsung Li | 2019-01-01 |
| 9741600 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Chung-Chieh Hsu, Chian-kun Chan, Chih-Ping Chen, Hsu-Shui Liu +3 more | 2017-08-22 |
| 9425077 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Yung-Kai Lin, Hsu-Shui Liu, Kai-Szu Lo, Chih-Ping Chen +3 more | 2016-08-23 |